Applicable equipment： Fulintec, AST, Branchy, CHA, Showa
2-5 inch front-mounted wafer tray
2-8 inch back-mounted deposition crucible
2-8 inch back-mounted wafer ring
2, 3 inch wafer spring
2~8 inch front-mounted deposition crucible
2~8 inch back-mounted wafer ring cover
EGL-35M&206M crater
Metal-mask-aluminum alloy holder
One-piece axis (reinforced axis to prevent deformation)
Secondary electron absorber
Heated lamp case
Vacuum chamber liners, stainless steel
various types of springs with different spring coefficients
