Applicable equipment: Fulintec, AST, Branchy, CHA, Showa

2-5 inch front-mounted wafer tray

2-8 inch back-mounted deposition crucible

2-8 inch back-mounted wafer ring

2, 3 inch wafer spring

2~8 inch front-mounted deposition crucible

2~8 inch back-mounted wafer ring cover

EGL-35M&206M crater

Metal-mask-aluminum alloy holder

One-piece axis (reinforced axis to prevent deformation)

Secondary electron absorber

Heated lamp case

Vacuum chamber liners, stainless steel

various types of springs with different spring coefficients
